Microfabricated inductors with through-wafer vias

ABSTRACT

The present invention relates to microfabricated inductors with through-wafer vias. In one embodiment, the present invention is an inductor including a first wafer, a first plurality of metal fillings located within the first wafer, and a first plurality of metal conductors connecting the first plurality of metal fillings together to form a first spiral with a first plurality of windings. In another embodiment, the present invention is a method for producing an inductor including the steps of forming a first plurality of vias in a first substrate, filling the first plurality of vias in the first substrate with a first plurality of metal fillings, forming a first plurality of metal conductors, and connecting pairs of the first plurality of metal fillings together using the first plurality of metal conductors to form a spiral.

BACKGROUND

1. Field

The present invention relates to microfabricated inductors with through-wafer vias.

2. Related Art

RF systems often use inductors. However, conventional inductors with an air center require a large amount of physical space and may also have a relatively low Q factor. This can place a limit or hamper the ability of reducing the size of RF systems. Furthermore, the relatively low Q factor can reduce the performance of RF systems at high frequencies.

Thus, there is a need for inductors which occupy a reduced amount of space and possess an improved Q factor.

SUMMARY

In one embodiment, the present invention is an inductor including a first wafer, a first plurality of metal fillings located within the first wafer, and a first plurality of metal conductors connecting the first plurality of metal fillings together to form a first spiral with a first plurality of windings.

In another embodiment, the present invention is an inductor including a first wafer, a first plurality of metal fillings located within the first wafer, a first plurality of metal conductors connecting pairs of the first plurality of metal fillings together to form a first portion of a first spiral. The present invention also includes a second wafer, a second plurality of metal fillings located within the second wafer, and a second plurality of metal conductors connecting pairs of the second plurality of metal fillings together to form a second portion of the first spiral. The first portion of the first spiral and the second portion of the first spiral can be bonded together to form the first spiral.

In yet another embodiment, the present invention is a method for producing an inductor including the steps of forming a first plurality of vias in a first substrate, filling the first plurality of vias in the first substrate with a first plurality of metal fillings, forming a first plurality of metal conductors, and connecting pairs of the first plurality of metal fillings together using the first plurality of metal conductors to form a spiral.

BRIEF DESCRIPTION OF THE DRAWINGS

The features, objects, and advantages of the present invention will become more apparent from the detailed description set forth below when taken in conjunction with the drawings, wherein:

FIG. 1 is a perspective view of an embodiment of the present invention;

FIG. 2 is a top view of an embodiment of the present invention;

FIG. 3 is a graph of Q factors;

FIG. 4 is a side view of a production of an embodiment of the present invention;

FIG. 5 is a side view of a production of an embodiment of the present invention;

FIG. 6 is a side view of a production of an embodiment of the present invention;

FIG. 7 is a side view of a production of an embodiment of the present invention;

FIG. 8 is a side view of a production of an embodiment of the present invention;

FIG. 9 is a side view of a production of an embodiment of the present invention;

FIG. 10 is a side view of a production of an embodiment of the present invention;

FIG. 11 is a side view of a production of an embodiment of the present invention;

FIG. 12 is a side view of a production of an embodiment of the present invention;

FIG. 13 is a side view of a production of an embodiment of the present invention;

FIG. 14 is a side view of a production of an embodiment of the present invention;

FIG. 15 is a side view of a production of an embodiment of the present invention;

FIG. 16 is a side view of a production of an embodiment of the present invention;

FIG. 17 is a side view of a production of an embodiment of the present invention;

FIG. 18 is a side view of a production of an embodiment of the present invention;

FIG. 19 is a side view of a production of an embodiment of the present invention;

FIG. 20 is a side view of a production of an alternate embodiment of the present invention;

FIG. 21 is a side view of a production of an alternate embodiment of the present invention;

FIG. 22 a side view of a production of an alternate embodiment of the present invention;

FIG. 23 a side view of a production of an alternate embodiment of the present invention;

FIG. 24 a side view of a production of an alternate embodiment of the present invention;

FIG. 25 a side view of a production of an alternate embodiment of the present invention;

FIG. 26 a side view of a production of an alternate embodiment of the present invention;

FIG. 27 a side view of a production of an alternate embodiment of the present invention;

FIG. 28 a side view of a production of an alternate embodiment of the present invention;

FIG. 29 a side view of a production of an alternate embodiment of the present invention;

FIG. 30 a side view of a production of an alternate embodiment of the present invention;

FIG. 31 a side view of a production of an alternate embodiment of the present invention;

FIG. 32 a side view of a production of an alternate embodiment of the present invention;

FIG. 33 a side view of a production of an alternate embodiment of the present invention;

FIG. 34 a side view of a production of an alternate embodiment of the present invention;

FIG. 35 is a side view of an alternate embodiment of the present invention;

FIG. 36 is a top view of an alternate embodiment of the present invention; and

FIG. 37 is a top view of an alternate embodiment of the present invention.

DETAILED DESCRIPTION

Methods and systems that implement the embodiments of the various features of the present invention will now be described with reference to the drawings. The drawings and the associated descriptions are provided to illustrate embodiments of the present invention and not to limit the scope of the present invention. Reference in the specification to “one embodiment” or “an embodiment” is intended to indicate that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least an embodiment of the present invention. The appearances of the phrase “in one embodiment” or “an embodiment” in various places in the specification are not necessarily all referring to the same embodiment. Throughout the drawings, reference numbers are re-used to indicate correspondence between referenced elements.

FIG. 1 is a perspective view of an embodiment of the present invention while FIG. 2 is a top view of an embodiment of the present invention depicted in FIG. 1. As shown in FIG. 1 and FIG. 2, an inductor 2 is formed within a substrate 4. Substrate 4 can be formed, for example, from silicon (Si), insulators, a combination of silicon and insulators, and/or any other type of material suitable to form a core for an inductor. Substrate 4 can be a silicon wafer, or a silicon on insulator (SOI) wafer. Substrate 4 can, for example, be between approximately 100 μm to approximately 1000 μm thick. In one embodiment, substrate 4 is approximately 400 μm thick.

Inductor 2 includes a plurality of vias 6 which can be filled with metal fillings 8. The metal fillings 8 can be connected by conductors 10. Metal fillings 8 and conductors 10 can form windings and/or loops within substrate 4. The metal fillings 8 can be, for example, copper (Cu), copper alloys, silver (Ag), silver alloys, or any other types of conductive metal. Conductor 10 can also be copper (Cu), copper alloys, silver (Ag), silver alloys, or any other types of conductive metal. In one embodiment, metal fillings 8 and conductor 10 are formed from the same type of conductive metal. In another embodiment, metal fillings 8 and conductor 10 are formed from different types of conductive metal. The conductors 10 can be formed on a surface of the substrate 4.

A current can flow, for example, into metal filling 8 a, from metal filling 8 a to conductor 10 a, from conductor 10 a to metal filling 8 b, from metal filling 8 b to conductor 10 b, from conductor 10 b to metal filling 8 c, and so on such that the metal current traverses the loops formed by metal fillings 8 and conductors 10 within substrate 4.

Since inductor 2 is formed within substrate 4, inductor 2 can utilize less space. Inductor 2 can be 10 times smaller in each of three dimensions, thickness, width, and length when compared with a conventional inductor with an air center. Thus, inductor 2 can be approximately 1,000 times smaller than conventional inductors formed with wires, such as conventional inductors with air centers.

FIG. 3 is a graph of Q factors. The Q factor for inductors is governed by the equation

$Q = \frac{\omega \; L}{R}$

where R is the inductor's internal electrical resistance and ωL is the inductor's capacitive or inductive reactance at resonance.

As seen in FIG. 3, although the Q of a silicon-core inductor may not be as high as that of an air-core inductor at high frequencies, the Q of the inductor of the present invention is comparable to the Q of an air-core inductor at frequencies less than approximately 500 MHz. The present invention may be particularly valuable for applications below 500 MHz where the present invention can be used without compromising the Q. As seen in FIG. 3 at 0.1 GHz, the Q factor of the inductors with air centers can have a Q of approximately 10. In contrast, in one embodiment of the present invention, the Q factor of inductor 2 is 60 at 0.1 GHz as indicated by point 42. In another embodiment of the present invention, the Q factor of inductor 2 is 180 at 0.1 GHz as indicated by point 44.

FIG. 19 is a side view of an embodiment of the present invention. FIGS. 4 to 18 are side views of a production of an embodiment of the present invention disclosed in FIG. 19. As shown in FIG. 4, vias 6 are etched in substrate 4. Substrate 4 can have a first side and a second side. In FIG. 4, the first side is a top side of substrate 4 while the second side is a bottom side of substrate 4. In FIG. 5, substrate 4 is coated with an insulation layer 12. Insulation layer 12 can be, for example, Parylene, silicon oxide (SiO₂), or any other type of suitable insulation material. To coat insulation layer 12 on substrate 4, substrate 4 can be thermally oxidized or insulation layer 12 can be coated by performing deep reactive ion etching using a time sequenced etch and passivation process, such as the Bosch process, on substrate 4.

In FIG. 6, gold layer 14 is evaporated on the second side of substrate 4. In FIG. 7, gold layer 14 is deposited on insulation layer 12 of a dummy wafer 16. Gold layer 14 can be deposited on insulation layer 12 of dummy wafer 16 through evaporation. Dummy wafer 16 can be formed, for example, from silicon 4. In FIG. 8, dummy wafer 16 is bonded to substrate 4 through gold layer 14 for both substrate 4 and dummy wafer 16. In FIG. 9, a metal 26 is used to fill vias 6. Metal 26 can be, for example, copper, silver, nickel or any other metal with a relatively high conductivity such as the metal used for metal fillings 8. Furthermore, metal 26 can be filled in vias 6 by electroplating metal 26 through vias 6.

In FIG. 10, photoresist 18 is placed over the first side of substrate 4 encompassing metal 26 and insulation layer 12. Photoresist 18 provides protection for substrate 4 and the layers of materials between substrate 4 and photoresist 18 such as metal 26 and/or insulation layer 12. In FIG. 11, dummy wafer 16 is removed along with photoresist 18. The removal of photoresist 18 exposes metal 26 and insulation layer 12 on the first side of substrate 4. Dummy wafer 16 can be removed by grinding and etching dummy wafer 16. After dummy wafer 16 is removed, insulation layer 12 which was located on the second side of substrate 4 between dummy wafer 16 and gold layer 14 is also removed through etching.

In FIG. 12, metal 26 that juts above substrate 4 and insulation layer 12 on the first side of substrate 4 is removed through polishing. In FIG. 13, both gold layers 14 are removed. Also, metal 26 that juts above substrate 4 and insulation layer 12 on the second side of substrate 4 is also removed. In FIG. 14, seed layer 20 is deposited on both sides of substrate 4. Seed layer 20 can be, for example, copper, gold (Au), or any other suitable material to form conductors 10. In one embodiment, seed layer 20 can be between approximately 200 Å to approximately 3000 Å. In another embodiment, seed layer 20 is approximately 1000 Å.

In FIG. 15, photoresist 22 is layered on both sides of substrate 4. The layer of photoresist 22 on a first side of substrate 4 is patterned with holes where conductors 10 are formed. In FIG. 16, metal 26 is deposited in the holes, created during the patterning of photoresist 22, on the first side of substrate 4. Metal 26 can be deposited in the holes created during the patterning of photoresist 22, for example, through electroplating. In FIG. 17, the layer of photoresist 22 that was patterned in FIG. 15 is overlayed with photoresist covering up the holes. The layer of photoresist 22 on the second side of substrate 4 is now patterned with holes where conductors 10 will be formed. In FIG. 18, metal 26 is filled in the holes of the layer of photoresist 22 on the second side of substrate 4. In FIG. 19, the layers of photoresist 22 and seed layer 20 on both sides of substrate 4 are removed to form inductor 2 with substrate 4, metal fillings 8 and conductors 10. With the embodiment depicted in FIG. 19, inductor 2 can have a Q of approximately 60.

FIG. 35 is a side view of an alternate embodiment of the present invention. FIGS. 20 to 34 are side views of a production of an embodiment of the present invention disclosed in FIG. 35. In FIG. 20, a first substrate 4 is coated with insulation layer 12. In FIG. 35, the first substrate 4 is an SOI substrate with a first side and a second side. In FIG. 21, insulation layer 12 is patterned on one side of substrate 4 including forming holes on insulation layer 12 on the first side of the first substrate 4. In FIG. 22, the patterned insulation layer 12 on the first side is coated with photoresist 22. A pattern is created on photoresist 22 including holes above locations on the first substrate 4 where vias 6 should be created on the first substrate 4.

In FIG. 23, holes are etched in substrate 4 where vias 6 should be formed. In addition, a layer of photoresist 22 is deposited on the second side of the first substrate 4. The layer of photoresist 22 on the second side of the first substrate 4 is patterned and holes are created in the layer of photoresist 22 corresponding to the location of vias 6. In FIG. 24, holes are etched completely through the first substrate 4 to form vias 6. In FIG. 25, photoresist 22 is removed on both the first side and the second side of the first substrate 4 exposing the patterned insulation layer 12 on both the first side and the second side of substrate 4.

In FIG. 26, trenches 24 are formed in the first substrate 4 by etching the first substrate 4 at locations corresponding to the holes of the patterned insulation layer 12. The trenches 24 can be formed using deep reactive ion etching according to a time sequenced etch and passivation chemistry such as the Bosch process. By forming the trenches through deep reactive ion etching, rather than for example, using molds formed by photoresist, a closer packing of the trenches may be achieved. An aspect ratio of a depth of the trenches 24 to spacing between trenches 24 can be increased, for example, the aspect ratio can be equal to or greater than 2:1, such as 10:1. The larger aspect ratio increases an amount of metal fillings and metal conductors per area thus increasing the winding density, or the amount of windings per area, of the inductor 2. With a higher winding density, an inductance of the inductor 2 can be improved. The closer packing of the trenches 24 can thus improve the performance of inductor 2.

In FIG. 27, insulation layer 24 is placed inside trenches 24. Insulation layer 24 can be placed, for example, inside trenches 24 through oxidizing the first substrate 4. In FIG. 28, seed layer 20 is sputtered on the first side of the first substrate 4. In FIG. 29, metal 26 is plated on the first side of the first substrate 4.

In FIG. 30, dummy wafer 18 is resist bonded onto metal 26 using photoresist 26 on the first side of the first substrate 4. In FIG. 31, metal 26 is used to fill vias 6. Metal 26 can fill vias 6, for example, through electroplating. In FIG. 32, dummy wafer 18 is removed along with photoresist 22. In FIG. 33, excess metal 26 is removed from both the first side and the second side of the first substrate 4. Furthermore, both the first side and the second side of the first substrate 4 can be polished. In FIG. 34, gold layer 14 is deposited on an end of metal 26 in via 6 on the second side of the first substrate 4. In FIG. 35, the process depicted in FIGS. 20 to 34 is repeated for a second substrate 4. The second substrate 4, which has gone through the process depicted in FIGS. 20 to 34, is bonded with the first substrate 4 using a gold thermocompression bond at gold layers 14 to form inductor 2. Gold layers 14 can be, for example, gold bumps. With the embodiment depicted in FIG. 35, simulations have shown that inductor 2 can have a Q as high as 180. Although gold is used, other ductile metals can be used and the first substrate and the second substrate can be bonded with ductile metal bumps.

In both the embodiment depicted in FIG. 35 and the embodiment depicted in FIG. 19, metal fillings 8 and/or conductors 10 can be advantageously formed in a rectangular or elliptical shape in cross section. By having metal fillings 8 and/or conductors 10 formed in a rectangular or elliptical structure, they can be packed closer while taking up the same area thus increasing a winding density of the inductor 2 over conventional inductors. Conversely, with the same winding density, that is, the same amount of metal fillings 8 and/or conductors 10 per area, there is more current passing through the metal fillings 8 and/or conductors 10 due to the skin-effect. That is, the skin-effect drives the current to an outside edge of conductive materials. Rectangles and/or ovals beneficially have larger outside edges per unit area which thus reduces an amount of resistance in metal fillings 8 and/or conductors 10 and increases the amount of current passing through metal fillings 8 and/or conductors 10.

FIG. 36 is a top view of an alternate embodiment of the present invention. In FIG. 36, metal fillings 30 have a larger width than metal fillings 8 disclosed in FIG. 1. In FIG. 36, metal fillings 30 have a rectangular shape in cross section, but metal fillings 30 can have any shape such as circular, oval, triangular, etc. By increasing the width of the metal fillings, the resistance of inductor 2 is decreased. Since the Q factor is governed by the equation

$Q = \frac{\omega \; L}{R}$

where R is the inductor's internal electrical resistance and ωL is the inductor's capacitive or inductive reactance at resonance, any decrease in the amount of resistance results in an overall increase in the Q factor.

FIG. 37 is a top view of an alternate embodiment of the present invention. FIG. 37 includes metal fillings 34 and metal contacts 38 which are connected in parallel to metal fillings 8 and metal contacts 10. By doing so, two inductors can be sandwiched into an area for a single inductor. However, since the two inductors are connected in parallel, simulations have shown that while the inductance may be decreased, the resistance will be decreased at a greater amount than the decrease in inductance. For example, the resistance can, for example, be decreased to approximately 50% of its original value. Therefore, the inductance would be decreased by less than 50% of its original value. Since the corresponding decrease in resistance is greater than the corresponding decrease in inductance, the overall Q value would be increased.

Furthermore, as shown in FIG. 37, metal fillings 32 are connected in parallel with metal fillings 8, while metal fillings 36 are connected in parallel with metal fillings 34. Since the metal fillings 32 are connected in parallel, the overall resistance of the metal fillings in inductor 2 is reduced. Since the resistance in inductor 2 is reduced, the Q factor is increased through metal fillings 32 being connected in parallel with metal fillings 8 and metal fillings 36 being connected in parallel with metal fillings 34. 

1. An inductor comprising: a first wafer; a first plurality of metal fillings located within the first wafer; and a first plurality of metal conductors connecting the first plurality of metal fillings together to form a first spiral with a first plurality of windings.
 2. The inductor of claim 1 wherein the first wafer includes a first plurality of vias coated with an insulation material, the first plurality of vias containing the first plurality of metal fillings.
 3. The inductor of claim 1 wherein the first wafer includes a first plurality of trenches coated with an insulation material, the first plurality of trenches containing the first plurality of metal conductors.
 4. The inductor of claim 3 wherein each of the first plurality of trenches have a depth to spacing aspect ratio equal to or greater than 2:1.
 5. The inductor of claim 1 wherein the first plurality of metal fillings is rectangular shaped in cross section.
 6. The inductor of claim 1 wherein the first plurality of metal fillings is oval shaped in cross section.
 7. The inductor of claim 1 further comprising: a second plurality of metal fillings located within the first wafer, each of the second plurality of metal fillings connected to one of the first plurality of metal fillings to form a metal fillings group conducting in parallel.
 8. The inductor of claim 1 further comprising: a second plurality of metal fillings located within the first wafer; and a second plurality of metal conductors connecting the second plurality of metal fillings together to form a second spiral including a second plurality of windings, the first spiral connected to the second spiral to form a spiral group conducting in parallel.
 9. An inductor comprising: a first wafer; a first plurality of metal fillings located within the first wafer; a first plurality of metal conductors connecting pairs of the first plurality of metal fillings together to form a first portion of a first spiral; a second wafer; a second plurality of metal fillings located within the second wafer; and a second plurality of metal conductors connecting pairs of the second plurality of metal fillings together to form a second portion of the first spiral, the first portion of the first spiral and the second portion of the first spiral bonded together to form the first spiral.
 10. The inductor of claim 9 wherein the first plurality of metal fillings are substantially aligned with the second plurality of metal fillings.
 11. The inductor of claim 10 wherein the first plurality of metal filings and the second plurality of metal fillings are bonded through a ductile metal bump.
 12. The inductor of claim 11 wherein the ductile metal bump is a gold bump.
 13. The inductor of claim 9 wherein the first wafer includes a first plurality of vias coated with an insulation material, the first plurality of vias containing the first plurality of metal fillings, and the second wafer includes a second plurality of vias coated with the insulation material, the second plurality of vias containing the second plurality of metal fillings.
 14. The inductor of claim 9 wherein the first wafer includes a first plurality of trenches coated with an insulation material, the first plurality of trenches containing the first plurality of metal conductors, and the second wafer includes a second plurality of trenches coated with the insulation material, the second plurality of trenches containing the second plurality of metal conductors.
 15. The inductor of claim 14 wherein the first plurality of trenches and the second plurality of trenches each have a depth to spacing aspect ratio equal to or greater than 2:1.
 16. The inductor of claim 9 wherein the first plurality of metal fillings is rectangular shaped in cross section.
 17. The inductor of claim 9 wherein the first plurality of metal fillings is oval shaped in cross section.
 18. The inductor of claim 9 further comprising: a third plurality of metal fillings located within the first wafer, each of the third plurality of metal fillings connected to one of the first plurality of metal fillings to form a first metal fillings group conducting in parallel; and a fourth plurality of metal fillings located within the second wafer, each of the fourth plurality of metal fillings connected to one of the second plurality of metal fillings to form a second metal fillings group conducting in parallel.
 19. The inductor of claim 9 further comprising: a third plurality of metal fillings located within the first wafer; a third plurality of metal conductors connecting pairs of the third plurality of metal fillings together to form a first portion of a second spiral; a fourth plurality of metal fillings located within the second wafer; and a fourth plurality of metal conductors connecting pairs of the fourth plurality of metal fillings together, to form a second portion of the second spiral, the first portion of the first spiral and the second portion of the second spiral bonded to form the second spiral, wherein the first spiral and the second spiral are connected to form a spiral group conducting in parallel.
 20. A method for producing an inductor comprising the steps of: forming a first plurality of vias in a first substrate; filling the first plurality of vias in the first substrate with a first plurality of metal fillings; forming a first plurality of metal conductors; and connecting pairs of the first plurality of metal fillings together using the first plurality of metal conductors to form a spiral.
 21. The method of claim 20 further comprising the step of: forming an insulating layer within the first plurality of vias.
 22. The method of claim 20 further comprising the steps of: forming a first plurality of trenches within the first substrate; forming a first insulating layer within the first plurality of trenches; and forming the first plurality of metal conductors on top of the first insulating layer within the first plurality of trenches.
 23. The method of claim 22 further comprising the step of: increasing a winding density of the spiral by forming each of the first plurality of trenches with a depth to spacing aspect ratio equal to or greater than 2:1.
 24. The method of claim 23 further comprising the step of forming the first plurality of trenches with deep reactive ion etching using a time sequenced etch and passivation process.
 25. The method of claim 20 further comprising the step of plating metal into photoresist molds to form the first plurality of metal conductors.
 26. The method of claim 20 wherein the first plurality of metal fillings are formed in a rectangular cross section shape to reduce resistance within the first plurality of metal fillings.
 27. The method of claim 20 wherein the first plurality of metal fillings are formed in an oval cross section shape to reduce resistance within the first plurality of metal fillings.
 28. The method of claim 20 further comprising the steps of: forming a second plurality of vias in a second substrate; filling the second plurality of vias in the second substrate with a second plurality of metal fillings; forming a second plurality of metal conductors; connecting pairs of the second plurality of metal fillings together using the second plurality of metal conductors; and connecting the first plurality of metal fillings to the second plurality of metal fillings to form the spiral.
 29. The method of claim 28 further comprising the step of bonding the first plurality of metal fillings to the second plurality of metal fillings using gold thermocompression bonding.
 30. The method of claim 28 further comprising the step of plating metal into photoresist molds to form the first plurality of metal conductors and the second plurality of metal conductors.
 31. The method of claim 28 further comprising the steps of: forming a first plurality of trenches within the first substrate; forming a first insulating layer within the first plurality of trenches; forming the first plurality of metal conductors on top of the first insulating layer within the first plurality of trenches; forming a second plurality of trenches within the second substrate; forming a second insulating layer within the second plurality of trenches; and forming the second plurality of metal conductors on top of the second insulating layer within the second plurality of trenches.
 32. The method of claim 31 further comprising the step of increasing a winding density of the spiral by forming each of the first plurality of trenches and each of the second plurality of trenches with a depth to spacing aspect ratio equal to or greater than 2:1.
 33. The method of claim 32 further comprising the step of forming the first plurality of trenches and the second plurality of trenches with deep reactive ion etching using a time sequenced etch and passivation process.
 34. The method of claim 28 wherein the first plurality of metal fillings and the second plurality of metal fillings are formed in a rectangular cross section shape to reduce resistance within the first plurality of metal fillings and the second plurality of metal fillings.
 35. The method of claim 28 wherein the first plurality of metal fillings and the second plurality of metal fillings are formed in an oval cross section shape to reduce resistance within the first plurality of metal fillings and the second plurality of metal fillings. 